The Crystal Structure and Properties of Barium Zirconate Titanate and Barium Stannate Titanate Thin Films for Microwave Applications

The Crystal Structure and Properties of Barium Zirconate Titanate and Barium Stannate Titanate Thin Films for Microwave Applications

Structural and radio frequency (RF) dielectric properties of thin films of ferroelectric solid solutions BaZrxTi1-xO3 and BaSnxTi1-xO3 obtained by RF magnetron sputtering of ceramic targets on Pt/ r-cut of Al2O3 sapphire substrate are investigated. A high tunability of thin layers and low values of...

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Bibliographic Details
Main Authors: A. V. Tumarkin, S. V. Razumov, A. G. Gagarin, A. M. Cherniavskii, N. A. Yalymov, M. V. Zlygostov, A. A. Poteshkina, Y. A. Uvarenkova, V. I. Ivanova
Format: Article
Language:Russian
Published: Saint Petersburg Electrotechnical University "LETI" 2016-10-01
Series:Известия высших учебных заведений России: Радиоэлектроника
Subjects:
высокочастотное магнетронное распыление
тонкие пленки
титанат бария-стронция
титанат-цирконат бария
титанат-станнат бария
рентгеновская дифрактометрия
Online Access:https://re.eltech.ru/jour/article/view/135

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https://re.eltech.ru/jour/article/view/135

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