Wafer-scale integration of sacrificial nanofluidic chips for detecting and manipulating single DNA molecules

The wide use of microfluidics for biological analysis demands scalable preparation methods, yet in practice it is very challenging. Here, Wanget al. show a wafer-scale fabrication of nanofluidic chips with single-digit nanometre dimension, which is compatible with standard semiconductor processing.

Bibliographic Details
Main Authors: Chao Wang, Sung-Wook Nam, John M. Cotte, Christopher V. Jahnes, Evan G. Colgan, Robert L. Bruce, Markus Brink, Michael F. Lofaro, Jyotica V. Patel, Lynne M. Gignac, Eric A. Joseph, Satyavolu Papa Rao, Gustavo Stolovitzky, Stanislav Polonsky, Qinghuang Lin
Format: Article
Language:English
Published: Nature Portfolio 2017-01-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/ncomms14243