Non-invasive fabrication of plasmonic nanostructures on dielectric substrates coated with transparent-conductive oxide
Modern photonics demands for high-resolution (HR) and deterministic lithography on transparent substrates. Thermal scanning-probe lithography (t-SPL) is a mask-less approach that couples a nanoscopic patterning resolution with the possibility to perform morphological characterizations without damagi...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_04001.pdf |