Efficient machine learning-assisted failure analysis method for circuit-level defect prediction
Integral to the success of transistor advancements is the accurate use of failure analysis (FA) which benefits in fine-tuning and optimization of the fabrication processes. However, the chip makers face several FA challenges as device sizes, structure, and material complexities scale dramatically. T...
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Format: | Article |
Language: | English |
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Elsevier
2024-06-01
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Series: | Machine Learning with Applications |
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Online Access: | http://www.sciencedirect.com/science/article/pii/S2666827024000136 |