Nano/micro-beam deflections: Investigation of subjected forces and applications
Micro- and Nano beam MEMS devices possess a broad range of applications owing to their capability to produce precise mechanical motion and sensing capabilities at a small scale. In the field of biomedicine, these devices have been employed in applications such as tissue engineering, lab-on-a-chip sy...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-12-01
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| Series: | Physics Open |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S266603262300056X |