TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT
Measuring tools used for the forming of programming motions in the assembly and opto-mechanical equipment of microelectronics were analyzed. The structure of the trajectory control system based on approach of hardware-in-the-loop modeling and real-time verification was proposed. The results of using...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/187 |