TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT
Measuring tools used for the forming of programming motions in the assembly and opto-mechanical equipment of microelectronics were analyzed. The structure of the trajectory control system based on approach of hardware-in-the-loop modeling and real-time verification was proposed. The results of using...
| প্রধান লেখক: | , , |
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| বিন্যাস: | প্রবন্ধ |
| ভাষা: | Russian |
| প্রকাশিত: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| মালা: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| বিষয়গুলি: | |
| অনলাইন ব্যবহার করুন: | https://doklady.bsuir.by/jour/article/view/187 |