TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT
Measuring tools used for the forming of programming motions in the assembly and opto-mechanical equipment of microelectronics were analyzed. The structure of the trajectory control system based on approach of hardware-in-the-loop modeling and real-time verification was proposed. The results of using...
| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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| Online Access: | https://doklady.bsuir.by/jour/article/view/187 |
| _version_ | 1826547606741843968 |
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| author | I. V. Dainiak V. V. Jarski S. E. Karpovich |
| author_facet | I. V. Dainiak V. V. Jarski S. E. Karpovich |
| author_sort | I. V. Dainiak |
| collection | DOAJ |
| description | Measuring tools used for the forming of programming motions in the assembly and opto-mechanical equipment of microelectronics were analyzed. The structure of the trajectory control system based on approach of hardware-in-the-loop modeling and real-time verification was proposed. The results of using the proposed trajectory control system in coordinate systems of precision equipment were shown. |
| first_indexed | 2024-04-10T03:15:36Z |
| format | Article |
| id | doaj.art-8e69b7642d2f44c19e399820337e2c8f |
| institution | Directory Open Access Journal |
| issn | 1729-7648 |
| language | Russian |
| last_indexed | 2025-03-14T05:52:20Z |
| publishDate | 2019-06-01 |
| publisher | Educational institution «Belarusian State University of Informatics and Radioelectronics» |
| record_format | Article |
| series | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| spelling | doaj.art-8e69b7642d2f44c19e399820337e2c8f2025-03-05T12:43:00ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-01043842186TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENTI. V. Dainiak0V. V. Jarski1S. E. Karpovich2Белорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиБелорусский государственный университет информатики и радиоэлектроникиMeasuring tools used for the forming of programming motions in the assembly and opto-mechanical equipment of microelectronics were analyzed. The structure of the trajectory control system based on approach of hardware-in-the-loop modeling and real-time verification was proposed. The results of using the proposed trajectory control system in coordinate systems of precision equipment were shown.https://doklady.bsuir.by/jour/article/view/187координатная системасистема траекторного управленияпрецизионное оборудованиемикроэлектроника |
| spellingShingle | I. V. Dainiak V. V. Jarski S. E. Karpovich TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki координатная система система траекторного управления прецизионное оборудование микроэлектроника |
| title | TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT |
| title_full | TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT |
| title_fullStr | TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT |
| title_full_unstemmed | TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT |
| title_short | TRAJECTORY CONTROL OF COORDINATE SYSTEMS OF SUBMICRON MICROELECTRONICS EQUIPMENT |
| title_sort | trajectory control of coordinate systems of submicron microelectronics equipment |
| topic | координатная система система траекторного управления прецизионное оборудование микроэлектроника |
| url | https://doklady.bsuir.by/jour/article/view/187 |
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