Sub-5 nm AFM Tip Characterizer Based on Multilayer Deposition Technology

Sub-5 nm AFM Tip Characterizer Based on Multilayer Deposition Technology

Atomic force microscope (AFM) is commonly used for three-dimensional characterization of the surface morphology of structures at nanoscale, but the “Inflation effect” of the tip is an important factor affecting the accuracy. A tip characterizer has the advantages of in situ measurement, higher accur...

पूर्ण विवरण

ग्रंथसूची विवरण
मुख्य लेखकों: Ziruo Wu, Yingfan Xiong, Lihua Lei, Wen Tan, Zhaohui Tang, Xiao Deng, Xinbin Cheng, Tongbao Li
स्वरूप: लेख
भाषा:English
प्रकाशित: MDPI AG 2022-09-01
श्रृंखला:Photonics
विषय:
atomic force microscope
tip characterizer
multilayer deposition
critical dimension
ऑनलाइन पहुंच:https://www.mdpi.com/2304-6732/9/9/665

इंटरनेट

https://www.mdpi.com/2304-6732/9/9/665

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