Stochastic Optimal Control to Minimize the Impact of Manufacturing Variations on Nanomechanical Systems

This paper presents a control method intended to suppress the effects of manufacturing variations on nanomechanical systems. Often, the resonance characteristics of nanoscale devices are inconsistent, due to unavoidable variations in the fabrication process. This is important because resonant vibrat...

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Bibliographic Details
Main Authors: Yuji Ito, Keita Funayama, Jun Hirotani, Yutaka Ohno, Yukihiro Tadokoro
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Access
Subjects:
Online Access:https://ieeexplore.ieee.org/document/8911447/