Impact of bombardment by Ar+, Na+ and O2+ ions on spectra of elastically scattered electrons of single-crystal Ge
The impact of bombardment by Ar+, Na+, and O2+ ions on crystal structure, composition, and excitation energy of plasma oscillations and band-to-band transitions, was studied using elastically scattered electron spectroscopy. It has been shown that, regardless of the type of ions, after bombardment w...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
EDP Sciences
2023-01-01
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Series: | E3S Web of Conferences |
Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2023/38/e3sconf_conmechydro23_05006.pdf |