TiN hard coating as a candidate reference material for surface metrology in chemistry: characterization and quantification by bulk and surface analyses techniques
This study presents the synthesis and characterization of TiN hard coatings as a candidate reference material for surface metrology in chemistry. TiN coatings were grown on a silicon wafer with (111) orientation using dc reactive magnetron sputtering. X-ray diffraction confirms that the diffraction...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Consejo Superior de Investigaciones Científicas
2022-12-01
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| Series: | Revista de Metalurgia |
| Subjects: | |
| Online Access: | https://revistademetalurgia.revistas.csic.es/index.php/revistademetalurgia/article/view/1555 |