Thermodynamics and Kinetics of the Reaction of Catalytic Dismutation of Chlorosilanes in the Vapor Phase in the Temperature Range of 353–393 K
Currently, the most common method of silane synthesis for electronics and photovoltaics is trichlorosilane (TS) dismutation. TS dismutation proceeds in the form of a reactions cascade, therefore its study is of both practical and scientific interest. The results of calculating the equilibrium compos...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-02-01
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Series: | ChemEngineering |
Subjects: | |
Online Access: | https://www.mdpi.com/2305-7084/7/1/13 |