Thermodynamics and Kinetics of the Reaction of Catalytic Dismutation of Chlorosilanes in the Vapor Phase in the Temperature Range of 353–393 K

Thermodynamics and Kinetics of the Reaction of Catalytic Dismutation of Chlorosilanes in the Vapor Phase in the Temperature Range of 353–393 K

Currently, the most common method of silane synthesis for electronics and photovoltaics is trichlorosilane (TS) dismutation. TS dismutation proceeds in the form of a reactions cascade, therefore its study is of both practical and scientific interest. The results of calculating the equilibrium compos...

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Bibliographic Details
Main Authors: Georgy Mochalov, Yegor Stolmakov, Olesya Zhuchok
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:ChemEngineering
Subjects:
dichlorosilane
dismutation reaction silane synthesis
monochlorosilane
silane synthesis
thermodynamics
Online Access:https://www.mdpi.com/2305-7084/7/1/13

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