Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications
Piezoelectric single crystalline materials are paramount for high-speed data transfer in 5G technologies. The functionality of the end-devices demands temperature independent frequency filtering and high surface acoustic wave velocities, which are associated with the orientation dependent thermo-phy...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-01-01
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| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127521008613 |