Gas sensing properties of mixtures of copper and titanium oxides thin films
The subject of the current studies were mixtures of copper and titanium oxide thin films,with various elemental compositions, deposited by magnetron sputtering and annealed in the postprocess.The effect of elemental composition and annealing temperature on the morphology of thinfilms was determined...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
Military University of Technology, Warsaw
2023-03-01
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Series: | Biuletyn Wojskowej Akademii Technicznej |
Subjects: | |
Online Access: | http://biuletynwat.pl/gicid/01.3001.0054.2895 |