Gas sensing properties of mixtures of copper and titanium oxides thin films
The subject of the current studies were mixtures of copper and titanium oxide thin films,with various elemental compositions, deposited by magnetron sputtering and annealed in the postprocess.The effect of elemental composition and annealing temperature on the morphology of thinfilms was determined...
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| Format: | Article |
| Language: | English |
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Military University of Technology, Warsaw
2023-03-01
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| Series: | Biuletyn Wojskowej Akademii Technicznej |
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| Online Access: | http://biuletynwat.pl/gicid/01.3001.0054.2895 |
| _version_ | 1797257959522172928 |
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| author | Ewa Mańkowska Michał Mazur |
| author_facet | Ewa Mańkowska Michał Mazur |
| author_sort | Ewa Mańkowska |
| collection | DOAJ |
| description | The subject of the current studies were mixtures of copper and titanium oxide thin films,with various elemental compositions, deposited by magnetron sputtering and annealed in the postprocess.The effect of elemental composition and annealing temperature on the morphology of thinfilms was determined using scanning electron microscope images. The crystal structure and chemicalcomposition of copper‒titanium oxide (CuTi)Ox mixtures were investigated by X-ray diffraction.Hydrogen gas sensing experiments were performed for hydrogen with concentrations ranging from 100to 1,000 ppm. The resistance of the prepared (CuTi)Ox mixtures increased during hydrogen exposure,demonstrating the applicability of these oxides in hydrogen sensing. In addition, better sensor responseswere obtained for the mixtures in comparison to single copper oxides or titanium oxides. Mixturesof copper oxides and titanium oxides may be promising materials for hydrogen sensor applications.Keywords: mixtures of copper and titanium oxides, hydrogen gas sensors, mixed copper and titaniumoxides, thin films, magnetron sputtering |
| first_indexed | 2024-04-24T22:45:55Z |
| format | Article |
| id | doaj.art-8f064636a0884d5a8e82ea5795018c94 |
| institution | Directory Open Access Journal |
| issn | 1234-5865 |
| language | English |
| last_indexed | 2024-04-24T22:45:55Z |
| publishDate | 2023-03-01 |
| publisher | Military University of Technology, Warsaw |
| record_format | Article |
| series | Biuletyn Wojskowej Akademii Technicznej |
| spelling | doaj.art-8f064636a0884d5a8e82ea5795018c942024-03-18T11:20:50ZengMilitary University of Technology, WarsawBiuletyn Wojskowej Akademii Technicznej1234-58652023-03-01721374610.5604/01.3001.0054.289501.3001.0054.2895Gas sensing properties of mixtures of copper and titanium oxides thin filmsEwa Mańkowska0Michał Mazur1Politechnika Wrocławska, Wydział Elektroniki, Fotoniki i Mikrosystemów, ul. Janiszewskiego 11/17, 50-372 WrocławPolitechnika Wrocławska, Wydział Elektroniki, Fotoniki i Mikrosystemów, ul. Janiszewskiego 11/17, 50-372 WrocławThe subject of the current studies were mixtures of copper and titanium oxide thin films,with various elemental compositions, deposited by magnetron sputtering and annealed in the postprocess.The effect of elemental composition and annealing temperature on the morphology of thinfilms was determined using scanning electron microscope images. The crystal structure and chemicalcomposition of copper‒titanium oxide (CuTi)Ox mixtures were investigated by X-ray diffraction.Hydrogen gas sensing experiments were performed for hydrogen with concentrations ranging from 100to 1,000 ppm. The resistance of the prepared (CuTi)Ox mixtures increased during hydrogen exposure,demonstrating the applicability of these oxides in hydrogen sensing. In addition, better sensor responseswere obtained for the mixtures in comparison to single copper oxides or titanium oxides. Mixturesof copper oxides and titanium oxides may be promising materials for hydrogen sensor applications.Keywords: mixtures of copper and titanium oxides, hydrogen gas sensors, mixed copper and titaniumoxides, thin films, magnetron sputteringhttp://biuletynwat.pl/gicid/01.3001.0054.2895mixtures of copper and titanium oxideshydrogen gas sensorsmixed copper and titanium oxidesthin filmsmagnetron sputtering |
| spellingShingle | Ewa Mańkowska Michał Mazur Gas sensing properties of mixtures of copper and titanium oxides thin films Biuletyn Wojskowej Akademii Technicznej mixtures of copper and titanium oxides hydrogen gas sensors mixed copper and titanium oxides thin films magnetron sputtering |
| title | Gas sensing properties of mixtures of copper and titanium oxides thin films |
| title_full | Gas sensing properties of mixtures of copper and titanium oxides thin films |
| title_fullStr | Gas sensing properties of mixtures of copper and titanium oxides thin films |
| title_full_unstemmed | Gas sensing properties of mixtures of copper and titanium oxides thin films |
| title_short | Gas sensing properties of mixtures of copper and titanium oxides thin films |
| title_sort | gas sensing properties of mixtures of copper and titanium oxides thin films |
| topic | mixtures of copper and titanium oxides hydrogen gas sensors mixed copper and titanium oxides thin films magnetron sputtering |
| url | http://biuletynwat.pl/gicid/01.3001.0054.2895 |
| work_keys_str_mv | AT ewamankowska gassensingpropertiesofmixturesofcopperandtitaniumoxidesthinfilms AT michałmazur gassensingpropertiesofmixturesofcopperandtitaniumoxidesthinfilms |