Design and Analysis of a Novel Flexure-Based XY Micropositioning Stage
Flexure-based micropositioning stages with high positioning precision are really attractive. This paper reports the design and analysis processes of a two-degree-of-freedom (2-DOF) flexure-based XY micropositioning stage driven by piezoelectric actuators to improve the positioning accuracy and motio...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-11-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/10/23/8336 |