Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning

Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning

This article presents a data-driven algorithm that combines the advantages of iterative feedforward tuning and disturbance rejection control to satisfy the precision requirements and ensure extrapolation capability of wafer scanning. The proposed algorithm differs from pre-existing algorithms in ter...

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Bibliographic Details
Main Authors: Mingsheng Cao, Yumeng Bo, Huibin Gao
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
Data-driven
disturbance rejection control
feedforward control
iterative parameter tuning
wafer stage
Online Access:https://ieeexplore.ieee.org/document/9211391/

Internet

https://ieeexplore.ieee.org/document/9211391/

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