Multitarget Reactive Magnetron Sputtering towards the Production of Strontium Molybdate Thin Films

Multitarget Reactive Magnetron Sputtering towards the Production of Strontium Molybdate Thin Films

X-ray photoelectron spectroscopy was used to study the direct synthesis of strontium and molybdenum oxide thin films deposited by multitarget reactive magnetron sputtering (MT-RMS). Sr and Mo targets with a purity of 99.9% and 99.5%, respectively, were co-sputtered in an argon–oxygen gas mixture. Th...

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Bibliographic Details
Main Authors: Mindaugas Andrulevičius, Evgenii Artiukh, Gunnar Suchaneck, Sitao Wang, Nikolai A. Sobolev, Gerald Gerlach, Asta Tamulevičienė, Brigita Abakevičienė, Sigitas Tamulevičius
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Materials
Subjects:
strontium molybdate
multitarget reactive magnetron sputtering
X-ray photoelectron spectroscopy
Online Access:https://www.mdpi.com/1996-1944/16/6/2175

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https://www.mdpi.com/1996-1944/16/6/2175

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