Vibration optimization of ZnO thin film bulk acoustic resonator with ring electrodes
A rectangular ZnO thin film bulk acoustic resonator with ring electrodes is presented in this paper to demonstrate the existence of a nearly uniform displacement distribution at the central part of this typical resonator. The variational formulation based on two-dimensional scalar differential equat...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-04-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4945732 |