Vibration optimization of ZnO thin film bulk acoustic resonator with ring electrodes

A rectangular ZnO thin film bulk acoustic resonator with ring electrodes is presented in this paper to demonstrate the existence of a nearly uniform displacement distribution at the central part of this typical resonator. The variational formulation based on two-dimensional scalar differential equat...

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Dettagli Bibliografici
Autori principali: Zinan Zhao, Zhenghua Qian, Bin Wang
Natura: Articolo
Lingua:English
Pubblicazione: AIP Publishing LLC 2016-04-01
Serie:AIP Advances
Accesso online:http://dx.doi.org/10.1063/1.4945732