Structural optimization and simulation of piezoelectric- piezoresistive coupled MEMS steady-state electric field sensor
Abstract: In view of the problems of large volume, high energy consumption and difficult maintenance of electric field measurement sensors in existing power systems, non-contact miniature electric field sensors have become a hot topic in current research. In this paper, a MEMS miniature electric fie...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Frontiers Media S.A.
2023-01-01
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| Series: | Frontiers in Energy Research |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fenrg.2022.1006777/full |