Structural optimization and simulation of piezoelectric- piezoresistive coupled MEMS steady-state electric field sensor

Structural optimization and simulation of piezoelectric- piezoresistive coupled MEMS steady-state electric field sensor

Abstract: In view of the problems of large volume, high energy consumption and difficult maintenance of electric field measurement sensors in existing power systems, non-contact miniature electric field sensors have become a hot topic in current research. In this paper, a MEMS miniature electric fie...

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Bibliographic Details
Main Authors:	Guote Liu, Yuanhao Ye, Bing Luo, Yu Gu, Weijia Zheng, Sijun Chen
Format:	Article
Language:	English
Published:	Frontiers Media S.A. 2023-01-01
Series:	Frontiers in Energy Research
Subjects:	electric field measurement MEMS sensor finite element simulation piezoelectric effect piezoresistive effect
Online Access:	https://www.frontiersin.org/articles/10.3389/fenrg.2022.1006777/full

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