Recent Progress in MEMS Fiber-Optic Fabry–Perot Pressure Sensors
Pressure sensing plays an important role in many industrial fields; conventional electronic pressure sensors struggle to survive in the harsh environment. Recently microelectromechanical systems (MEMS) fiber-optic Fabry–Perot (FP) pressure sensors have attracted great interest. Here we review the ba...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-02-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/24/4/1079 |