Combinatorial design of amorphous TaNiSiC thin films with enhanced hardness, thermal stability, and corrosion resistance
Amorphous TaNiSiC and TaNiC films (with varying Ta/Ni and Si/C ratios) were deposited using combinatorial magnetron sputtering. The TaNiSiC films remained X-ray amorphous after four hour-long annealings up to 700 °C, while TaNiC alloys with high Ni and C contents crystallized. These differences were...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-08-01
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| Series: | Materials & Design |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S026412752200449X |