Analysis of cavitation and shear in bellows pump: transient CFD modelling and high-speed visualization
Pneumatic drive bellows pumps (PDBPs) are a crucial fluid control component in the semiconductor industry. However, when dealing with specific chemical mechanical polishing (CMP) slurries, agglomeration of particles can occur, leading to scratches, particle residues, pits, and other defects on the w...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2023-12-01
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| Series: | Engineering Applications of Computational Fluid Mechanics |
| Subjects: | |
| Online Access: | https://www.tandfonline.com/doi/10.1080/19942060.2023.2247474 |