Analysis of cavitation and shear in bellows pump: transient CFD modelling and high-speed visualization
Pneumatic drive bellows pumps (PDBPs) are a crucial fluid control component in the semiconductor industry. However, when dealing with specific chemical mechanical polishing (CMP) slurries, agglomeration of particles can occur, leading to scratches, particle residues, pits, and other defects on the w...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2023-12-01
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| Series: | Engineering Applications of Computational Fluid Mechanics |
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| Online Access: | https://www.tandfonline.com/doi/10.1080/19942060.2023.2247474 |
| _version_ | 1797403918283571200 |
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| author | Tianyi Ge Liang Hu Rui Su Xiaodong Ruan |
| author_facet | Tianyi Ge Liang Hu Rui Su Xiaodong Ruan |
| author_sort | Tianyi Ge |
| collection | DOAJ |
| description | Pneumatic drive bellows pumps (PDBPs) are a crucial fluid control component in the semiconductor industry. However, when dealing with specific chemical mechanical polishing (CMP) slurries, agglomeration of particles can occur, leading to scratches, particle residues, pits, and other defects on the wafer surface. The leading cause of agglomeration has been proposed to be cavitation and excessive shear in PDBPs. A high-fidelity multiphase computational fluid dynamics (CFD) model, which fully resolves the response of check valves under hydrodynamic and other external loads, was established to evaluate cavitation behaviour and shear distribution in PDBPs. Moreover, a test rig was built to visualize cavitating flow patterns in PDBPs and verify the accuracy of the CFD model. Among different cavitation regions captured by high-speed visualization, the region near the inner leading edge of the end-ring of the inlet valve is dominant, with high intensity, long duration, and complex morphology evolution. Detailed initiation and development process of cavities in the dominant region are analysed numerically. The shear rate in different domains of PDBPs is estimated, and the inlet valve domain stands out from the other. The strongest shear rate is observed near the leading edge of the end-ring. Furthermore, an analysis of the relationship between cavitation and shear indicates that the high-intensity vortices generated owing to strong shear account for the inception of cavitation. This study contributes to understanding inner flow details in PDBPs and provides a guideline for further optimization of similar pumps. |
| first_indexed | 2024-03-09T02:46:23Z |
| format | Article |
| id | doaj.art-91824eab942346e598fbef55f9b271ce |
| institution | Directory Open Access Journal |
| issn | 1994-2060 1997-003X |
| language | English |
| last_indexed | 2024-03-09T02:46:23Z |
| publishDate | 2023-12-01 |
| publisher | Taylor & Francis Group |
| record_format | Article |
| series | Engineering Applications of Computational Fluid Mechanics |
| spelling | doaj.art-91824eab942346e598fbef55f9b271ce2023-12-05T16:53:43ZengTaylor & Francis GroupEngineering Applications of Computational Fluid Mechanics1994-20601997-003X2023-12-0117110.1080/19942060.2023.2247474Analysis of cavitation and shear in bellows pump: transient CFD modelling and high-speed visualizationTianyi Ge0Liang Hu1Rui Su2Xiaodong Ruan3State Key Laboratory of Fluid Power and Mechatronic System, Zhejiang University, Hangzhou, People's Republic of ChinaState Key Laboratory of Fluid Power and Mechatronic System, Zhejiang University, Hangzhou, People's Republic of ChinaState Key Laboratory of Fluid Power and Mechatronic System, Zhejiang University, Hangzhou, People's Republic of ChinaState Key Laboratory of Fluid Power and Mechatronic System, Zhejiang University, Hangzhou, People's Republic of ChinaPneumatic drive bellows pumps (PDBPs) are a crucial fluid control component in the semiconductor industry. However, when dealing with specific chemical mechanical polishing (CMP) slurries, agglomeration of particles can occur, leading to scratches, particle residues, pits, and other defects on the wafer surface. The leading cause of agglomeration has been proposed to be cavitation and excessive shear in PDBPs. A high-fidelity multiphase computational fluid dynamics (CFD) model, which fully resolves the response of check valves under hydrodynamic and other external loads, was established to evaluate cavitation behaviour and shear distribution in PDBPs. Moreover, a test rig was built to visualize cavitating flow patterns in PDBPs and verify the accuracy of the CFD model. Among different cavitation regions captured by high-speed visualization, the region near the inner leading edge of the end-ring of the inlet valve is dominant, with high intensity, long duration, and complex morphology evolution. Detailed initiation and development process of cavities in the dominant region are analysed numerically. The shear rate in different domains of PDBPs is estimated, and the inlet valve domain stands out from the other. The strongest shear rate is observed near the leading edge of the end-ring. Furthermore, an analysis of the relationship between cavitation and shear indicates that the high-intensity vortices generated owing to strong shear account for the inception of cavitation. This study contributes to understanding inner flow details in PDBPs and provides a guideline for further optimization of similar pumps.https://www.tandfonline.com/doi/10.1080/19942060.2023.2247474Cavitationshearbellows pumphigh-speed visualizationcomputational fluid dynamics |
| spellingShingle | Tianyi Ge Liang Hu Rui Su Xiaodong Ruan Analysis of cavitation and shear in bellows pump: transient CFD modelling and high-speed visualization Engineering Applications of Computational Fluid Mechanics Cavitation shear bellows pump high-speed visualization computational fluid dynamics |
| title | Analysis of cavitation and shear in bellows pump: transient CFD modelling and high-speed visualization |
| title_full | Analysis of cavitation and shear in bellows pump: transient CFD modelling and high-speed visualization |
| title_fullStr | Analysis of cavitation and shear in bellows pump: transient CFD modelling and high-speed visualization |
| title_full_unstemmed | Analysis of cavitation and shear in bellows pump: transient CFD modelling and high-speed visualization |
| title_short | Analysis of cavitation and shear in bellows pump: transient CFD modelling and high-speed visualization |
| title_sort | analysis of cavitation and shear in bellows pump transient cfd modelling and high speed visualization |
| topic | Cavitation shear bellows pump high-speed visualization computational fluid dynamics |
| url | https://www.tandfonline.com/doi/10.1080/19942060.2023.2247474 |
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