Growth Temperature Effect of Atomic-Layer-Deposited GdOx Films
Gadolinium oxide (Gd2O3) is one of the lanthanide rare-earth oxides, which has been extensively studied due to its versatile functionalities, such as a high permittivity, reactivity with moisture, and ionic conductivity, etc. In this work, GdOx thin film was grown by atomic layer deposition using cy...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Polish Academy of Sciences
2021-09-01
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| Series: | Archives of Metallurgy and Materials |
| Subjects: | |
| Online Access: | https://journals.pan.pl/Content/119248/PDF/AMM-2021-3-17-Byung%20Joon%20Choi.pdf |