Preparation of Cu thin film by cylindrical magnetron sputtering device
In the present work, a D.C. magnetron sputtering system was designed and fabricated. This chamber of this system includes two coaxial cylinders made from copper .the inner one used as a cathode while the outer one used as a node. The magnetic coils located on the outer cylinder (anode) .The profile...
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| Format: | Article |
| Language: | English |
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University of Baghdad
2009-12-01
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| Series: | Iraqi Journal of Physics |
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| Online Access: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/910 |