Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing
We investigated the correlation between microstructures and optical properties of boron ion implanted microcrystalline diamond (B-MCD) thin films annealed at different temperatures. Ellipsometry characterization of B-MCD films was performed in the wavelength range of 380–1000 nm and the disperse par...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2024-12-01
|
| Series: | Functional Diamond |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/26941112.2024.2330460 |