Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications
We present the feasibility in fabricating membranes and cantilevers made of diamond grown on Si/SiO<sub>2</sub> substrates by femtosecond laser ablation. In the ablation process, we generated nano- and microstructures on the membrane surface. Such laser-induced periodic surface structure...
| Principais autores: | , , , , , |
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| Formato: | Artigo |
| Idioma: | English |
| Publicado em: |
MDPI AG
2020-12-01
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| coleção: | Proceedings |
| Assuntos: | |
| Acesso em linha: | https://www.mdpi.com/2504-3900/56/1/13 |