Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta2O5)

Order within disorder: The atomic structure of ion-beam sputtered amorphous tantala (a-Ta2O5)

Amorphous tantala (a-Ta2O5) is a technologically important material often used in high-performance coatings. Understanding this material at the atomic level provides a way to further improve performance. This work details extended X-ray absorption fine structure measurements of a-Ta2O5 coatings, whe...

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Bibliographic Details
Main Authors: Riccardo Bassiri, Franklin Liou, Matthew R. Abernathy, Angie C. Lin, Namjun Kim, Apurva Mehta, Badri Shyam, Robert L. Byer, Eric K. Gustafson, Martin Hart, Ian MacLaren, Iain W. Martin, Roger K. Route, Sheila Rowan, Jonathan F. Stebbins, Martin M. Fejer
Format: Article
Language:English
Published: AIP Publishing LLC 2015-03-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.4913586

Internet

http://dx.doi.org/10.1063/1.4913586

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