FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer

FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer

The measurement of small displacements on the nanometric scale demands metrological systems of high accuracy and precision. In this context, interferometer-based displacement measurements have become the main tools used for traceable dimensional metrology. The different industrial applications in wh...

Full description

Bibliographic Details
Main Authors: Eduardo Cabal-Yepez, Ibrahim Serroukh, Roque Alfredo Osornio-Rios, Luis Alberto Vera-Salas, Sandra Veronica Moreno-Tapia, Rene de Jesus Romero-Troncoso, Arturo Garcia-Perez
Format: Article
Language:English
Published: MDPI AG 2011-08-01
Series:Sensors
Subjects:
smart sensor
FPGA
heterodyne interferometer
phase measurement
Online Access:http://www.mdpi.com/1424-8220/11/8/7710/

Internet

http://www.mdpi.com/1424-8220/11/8/7710/

Similar Items