Wideband dielectric properties of silicon and glass substrates for terahertz integrated circuits and microsystems

Wideband dielectric properties of silicon and glass substrates for terahertz integrated circuits and microsystems

This paper presents a comprehensive study of the optical and electrical dielectric material properties of six commonly-used silicon and glass substrates at terahertz (THz) frequencies, including refractive index, absorption coefficient, dielectric constant and loss factor. The material characterizat...

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Bibliographic Details
Main Authors: Nonchanutt Chudpooti, Nattapong Duangrit, Andrew D Burnett, Joshua R Freeman, Thomas B Gill, Chuwong Phongcharoenpanich, Ulrik Imberg, Danai Torrungrueng, Prayoot Akkaraekthalin, Ian D Robertson, Nutapong Somjit
Format: Article
Language:English
Published: IOP Publishing 2021-01-01
Series:Materials Research Express
Subjects:
THz time-domain spectroscopy
material characterization
dielectric properties
electrical properties
Online Access:https://doi.org/10.1088/2053-1591/abf684

Internet

https://doi.org/10.1088/2053-1591/abf684

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