Preparation and properties of AZO/Ag/AZO thin films on PMMA substrates
AZO/Ag/AZO transparent conductive films were prepared on PMMA substrate by DC magnetron sputtering at low temperature (70 ℃). The effect of AZO sputtering power on the structure and properties of AZO/Ag/AZO thin films were investigated. In order to encapsulate AZO/Ag/AZO films, the films were lamina...
Main Authors: | , , , , , |
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Format: | Article |
Language: | zho |
Published: |
Journal of Aeronautical Materials
2023-02-01
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Series: | Journal of Aeronautical Materials |
Subjects: | |
Online Access: | http://jam.biam.ac.cn/article/doi/10.11868/j.issn.1005-5053.2022.000054 |