Preparation and properties of AZO/Ag/AZO thin films on PMMA substrates

AZO/Ag/AZO transparent conductive films were prepared on PMMA substrate by DC magnetron sputtering at low temperature (70 ℃). The effect of AZO sputtering power on the structure and properties of AZO/Ag/AZO thin films were investigated. In order to encapsulate AZO/Ag/AZO films, the films were lamina...

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Bibliographic Details
Main Authors: XU Qingyuan, ZHANG Yunsheng, CHEN Chen, FENG Haibing, HUANG Peng, ZU Chengkui
Format: Article
Language:zho
Published: Journal of Aeronautical Materials 2023-02-01
Series:Journal of Aeronautical Materials
Subjects:
Online Access:http://jam.biam.ac.cn/article/doi/10.11868/j.issn.1005-5053.2022.000054

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