Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure

Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure

In the present paper, tribological properties of DLC films deposited by UBM sputtering were investigated by rolling contact friction tests under approximately 2.86GPa of high contact pressure. DLC films were deposited by UBM sputtering under substrate bias voltages such as 0 to -300V. Friction coeff...

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Bibliographic Details
Main Authors: Morimasa NAKAMURA, Hiromi KODAMA, Ken-ichi MIURA, Kei DEMIZU, Daisuke IBA, Ichiro MORIWAKI
Format: Article
Language:English
Published: The Japan Society of Mechanical Engineers 2012-01-01
Series:Journal of Advanced Mechanical Design, Systems, and Manufacturing
Subjects:
dlc
sputtering
rolling contact
fracture
high pressure
Online Access:https://www.jstage.jst.go.jp/article/jamdsm/6/1/6_1_121/_pdf/-char/en

Internet

https://www.jstage.jst.go.jp/article/jamdsm/6/1/6_1_121/_pdf/-char/en

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