Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure
In the present paper, tribological properties of DLC films deposited by UBM sputtering were investigated by rolling contact friction tests under approximately 2.86GPa of high contact pressure. DLC films were deposited by UBM sputtering under substrate bias voltages such as 0 to -300V. Friction coeff...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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The Japan Society of Mechanical Engineers
2012-01-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/6/1/6_1_121/_pdf/-char/en |
| _version_ | 1818521978516013056 |
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| author | Morimasa NAKAMURA Hiromi KODAMA Ken-ichi MIURA Kei DEMIZU Daisuke IBA Ichiro MORIWAKI |
| author_facet | Morimasa NAKAMURA Hiromi KODAMA Ken-ichi MIURA Kei DEMIZU Daisuke IBA Ichiro MORIWAKI |
| author_sort | Morimasa NAKAMURA |
| collection | DOAJ |
| description | In the present paper, tribological properties of DLC films deposited by UBM sputtering were investigated by rolling contact friction tests under approximately 2.86GPa of high contact pressure. DLC films were deposited by UBM sputtering under substrate bias voltages such as 0 to -300V. Friction coefficients of DLC films deposited under low bias voltage were unstable. And it was found that this unstable friction coefficient occurred when the counterpart ball began to contact with sliding. From observation of the cross section of DLC films after occurring unstable friction coefficients using SEM, the films were fractured in the a-C:H or Cr/C gradient interlayer. Moreover, these fractures had already occurred before sliding. DLC films were thought to be damaged by rolling with slightly sliding contact with high pressure in very short time. It was clear that DLC film deposited under substrate bias voltage -300V has the best performance for high contact pressure. And the change in Young's modulus of Cr/C gradient interlayer at the interface continuously seemed to be important to prevent the fracture of DLC film due to high pressure. |
| first_indexed | 2024-12-11T01:58:36Z |
| format | Article |
| id | doaj.art-938794e2acd848089fc45e8529a53e09 |
| institution | Directory Open Access Journal |
| issn | 1881-3054 |
| language | English |
| last_indexed | 2024-12-11T01:58:36Z |
| publishDate | 2012-01-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| spelling | doaj.art-938794e2acd848089fc45e8529a53e092022-12-22T01:24:33ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542012-01-016112113010.1299/jamdsm.6.121jamdsmEffects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High PressureMorimasa NAKAMURA0Hiromi KODAMA1Ken-ichi MIURA2Kei DEMIZU3Daisuke IBA4Ichiro MORIWAKI5Kyoto Institute of TechnologyGraduate School of KITTechnology Research Institute of Osaka PrefectureTechnology Research Institute of Osaka PrefectureKyoto Institute of TechnologyKyoto Institute of TechnologyIn the present paper, tribological properties of DLC films deposited by UBM sputtering were investigated by rolling contact friction tests under approximately 2.86GPa of high contact pressure. DLC films were deposited by UBM sputtering under substrate bias voltages such as 0 to -300V. Friction coefficients of DLC films deposited under low bias voltage were unstable. And it was found that this unstable friction coefficient occurred when the counterpart ball began to contact with sliding. From observation of the cross section of DLC films after occurring unstable friction coefficients using SEM, the films were fractured in the a-C:H or Cr/C gradient interlayer. Moreover, these fractures had already occurred before sliding. DLC films were thought to be damaged by rolling with slightly sliding contact with high pressure in very short time. It was clear that DLC film deposited under substrate bias voltage -300V has the best performance for high contact pressure. And the change in Young's modulus of Cr/C gradient interlayer at the interface continuously seemed to be important to prevent the fracture of DLC film due to high pressure.https://www.jstage.jst.go.jp/article/jamdsm/6/1/6_1_121/_pdf/-char/endlcsputteringrolling contactfracturehigh pressure |
| spellingShingle | Morimasa NAKAMURA Hiromi KODAMA Ken-ichi MIURA Kei DEMIZU Daisuke IBA Ichiro MORIWAKI Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure Journal of Advanced Mechanical Design, Systems, and Manufacturing dlc sputtering rolling contact fracture high pressure |
| title | Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure |
| title_full | Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure |
| title_fullStr | Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure |
| title_full_unstemmed | Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure |
| title_short | Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure |
| title_sort | effects of substrate bias voltages on tribological properties of dlc films under rolling sliding contact with high pressure |
| topic | dlc sputtering rolling contact fracture high pressure |
| url | https://www.jstage.jst.go.jp/article/jamdsm/6/1/6_1_121/_pdf/-char/en |
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