Effects of Substrate Bias Voltages on Tribological Properties of DLC Films under Rolling-Sliding Contact with High Pressure
In the present paper, tribological properties of DLC films deposited by UBM sputtering were investigated by rolling contact friction tests under approximately 2.86GPa of high contact pressure. DLC films were deposited by UBM sputtering under substrate bias voltages such as 0 to -300V. Friction coeff...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2012-01-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/6/1/6_1_121/_pdf/-char/en |