Characterization of the Response of Magnetron Sputtered In<sub>2</sub>O<sub>3−x</sub> Sensors to NO<sub>2</sub>
The response of resistive In<sub>2</sub>O<sub>3−x</sub> sensing devices was investigated as a function of the NO<sub>2</sub> concentration in different operative conditions. Sensing layers are 150 nm thick films manufactured by oxygen-free room temperature magnetr...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-03-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/6/3265 |