Characterization of the Response of Magnetron Sputtered In<sub>2</sub>O<sub>3−x</sub> Sensors to NO<sub>2</sub>

Characterization of the Response of Magnetron Sputtered In<sub>2</sub>O<sub>3−x</sub> Sensors to NO<sub>2</sub>

The response of resistive In<sub>2</sub>O<sub>3−x</sub> sensing devices was investigated as a function of the NO<sub>2</sub> concentration in different operative conditions. Sensing layers are 150 nm thick films manufactured by oxygen-free room temperature magnetr...

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Bibliographic Details
Main Authors:	Enza Panzardi, Nicola Calisi, Nicoleta Enea, Ada Fort, Marco Mugnaini, Valerio Vignoli, Anna Vinattieri, Mara Bruzzi
Format:	Article
Language:	English
Published:	MDPI AG 2023-03-01
Series:	Sensors
Subjects:	NO<sub>2</sub> sensors MOX gas sensor In<sub>2</sub>O<sub>3</sub> gas sensor magnetron sputtering deposition
Online Access:	https://www.mdpi.com/1424-8220/23/6/3265

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