ZnO based RRAM performance enhancement by 100 MeV Ag9+ irradiation

ZnO based RRAM performance enhancement by 100 MeV Ag9+ irradiation

This paper demonstrates the fabrication of a thin film of Zinc Oxide (ZnO) by RF sputtering on Indium Tin Oxide (ITO) substrate for Resistive Random-Access Memory (RRAM) application. The fabricated ZnO/ITO sample was bombarded with Swift Heavy Ion (SHI) of Ag9+ ions at 100 MeV with the fluence of 1 ...

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Bibliographic Details
Main Authors: Shikha Kaushik, Sujata Pandey, Rahul Singhal, Ranjit Kumar
Format: Article
Language:English
Published: Elsevier 2022-06-01
Series:Applied Surface Science Advances
Subjects:
Sputtering
Thin-film
Ion irradiation
Fluence
Online Access:http://www.sciencedirect.com/science/article/pii/S2666523922000502

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http://www.sciencedirect.com/science/article/pii/S2666523922000502

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