A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film Mold
In this study, an efficient nanofabrication process of metal microdisk arrays using direct imprinting was developed. This process was comprised of three steps; sputter etching on the quartz glass substrate, gold thin film deposition on an etched surface of a substrate, and transfer imprinting using...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-11-01
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| Series: | Crystals |
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| Online Access: | https://www.mdpi.com/2073-4352/11/12/1452 |