A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film Mold
In this study, an efficient nanofabrication process of metal microdisk arrays using direct imprinting was developed. This process was comprised of three steps; sputter etching on the quartz glass substrate, gold thin film deposition on an etched surface of a substrate, and transfer imprinting using...
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| Format: | Article |
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MDPI AG
2021-11-01
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| Series: | Crystals |
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| Online Access: | https://www.mdpi.com/2073-4352/11/12/1452 |
| _version_ | 1797505698077081600 |
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| author | Potejana Potejanasak |
| author_facet | Potejana Potejanasak |
| author_sort | Potejana Potejanasak |
| collection | DOAJ |
| description | In this study, an efficient nanofabrication process of metal microdisk arrays using direct imprinting was developed. This process was comprised of three steps; sputter etching on the quartz glass substrate, gold thin film deposition on an etched surface of a substrate, and transfer imprinting using a polyethylene terephthalate (PET) film mold on the Au thin film. A new idea to utilize a PET film mold for disk patterning by the nano transfer imprinting was examined. The PET film mold was prepared by thermally embossing the pillar pattern of a master mold on the PET film. The master mold was prepared from a silicon wafer. The PET film mold was used for transfer imprinting on a metal film deposited on a quartz substrate. The experimental results revealed that the PET film mold can effectively form gold micro-disk arrays on the Au film despite the PET film mold being softer than the Au film. This method can control the distribution and orientation of the nano-arrays on the disk. The plasmonic properties of the gold micro-disk arrays are studied and the absorbance spectrum exhibit depends on the distribution and orientation of gold micro-disk patterns. The nano-transfer imprinting technique is useful for fabricating metallic microdisk arrays on substrate as a plasmonic device. |
| first_indexed | 2024-03-10T04:22:05Z |
| format | Article |
| id | doaj.art-93dcd0cacece40d5abe3559ba19ac4a6 |
| institution | Directory Open Access Journal |
| issn | 2073-4352 |
| language | English |
| last_indexed | 2024-03-10T04:22:05Z |
| publishDate | 2021-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Crystals |
| spelling | doaj.art-93dcd0cacece40d5abe3559ba19ac4a62023-11-23T07:47:56ZengMDPI AGCrystals2073-43522021-11-011112145210.3390/cryst11121452A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film MoldPotejana Potejanasak0Department of Industrial Engineering, School of Engineering, University of Phayao, Phayao 56000, ThailandIn this study, an efficient nanofabrication process of metal microdisk arrays using direct imprinting was developed. This process was comprised of three steps; sputter etching on the quartz glass substrate, gold thin film deposition on an etched surface of a substrate, and transfer imprinting using a polyethylene terephthalate (PET) film mold on the Au thin film. A new idea to utilize a PET film mold for disk patterning by the nano transfer imprinting was examined. The PET film mold was prepared by thermally embossing the pillar pattern of a master mold on the PET film. The master mold was prepared from a silicon wafer. The PET film mold was used for transfer imprinting on a metal film deposited on a quartz substrate. The experimental results revealed that the PET film mold can effectively form gold micro-disk arrays on the Au film despite the PET film mold being softer than the Au film. This method can control the distribution and orientation of the nano-arrays on the disk. The plasmonic properties of the gold micro-disk arrays are studied and the absorbance spectrum exhibit depends on the distribution and orientation of gold micro-disk patterns. The nano-transfer imprinting technique is useful for fabricating metallic microdisk arrays on substrate as a plasmonic device.https://www.mdpi.com/2073-4352/11/12/1452gold micro-disk arraystransfer imprinting methodPET film moldthermal embossing technique |
| spellingShingle | Potejana Potejanasak A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film Mold Crystals gold micro-disk arrays transfer imprinting method PET film mold thermal embossing technique |
| title | A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film Mold |
| title_full | A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film Mold |
| title_fullStr | A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film Mold |
| title_full_unstemmed | A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film Mold |
| title_short | A Study on Fabrication Process of Gold Microdisk Arrays by the Direct Imprinting Method Using a PET Film Mold |
| title_sort | study on fabrication process of gold microdisk arrays by the direct imprinting method using a pet film mold |
| topic | gold micro-disk arrays transfer imprinting method PET film mold thermal embossing technique |
| url | https://www.mdpi.com/2073-4352/11/12/1452 |
| work_keys_str_mv | AT potejanapotejanasak astudyonfabricationprocessofgoldmicrodiskarraysbythedirectimprintingmethodusingapetfilmmold AT potejanapotejanasak studyonfabricationprocessofgoldmicrodiskarraysbythedirectimprintingmethodusingapetfilmmold |