Thick gate oxide extrinsic breakdown – The potential role of neutral hydrogen atom

Power electronics is currently a hot topic due to its important role in fighting climate change. Gate oxide breakdown is the Achilles heel of power devices, and it is well known that extrinsic breakdown is the chief concern. However, the root cause of extrinsic breakdown is poorly understood. Recent...

Full description

Bibliographic Details
Main Author: Kin P Cheung
Format: Article
Language:English
Published: Elsevier 2023-03-01
Series:Power Electronic Devices and Components
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2772370422000219