Design and Development of a MOEMS Accelerometer Using SOI Technology

Design and Development of a MOEMS Accelerometer Using SOI Technology

The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI). Here, we present the design, fabrication, and characterizat...

Full description

Bibliographic Details
Main Authors: José Mireles, Ángel Sauceda, Abimael Jiménez, Manuel Ramos, Rafael Gonzalez-Landaeta
Format: Article
Language:English
Published: MDPI AG 2023-01-01
Series:Micromachines
Subjects:
vibration measurement
micro-opto-electro-mechanical system (MOEMS)
silicon-on-insulator (SOI)
Fabry–Pérot interferometry
demodulation
Online Access:https://www.mdpi.com/2072-666X/14/1/231

Internet

https://www.mdpi.com/2072-666X/14/1/231

Similar Items