Investigation of thermally stimulated conductivity of cobalt silicide
Mono- and disilicide of cobalt were obtained in the near-surface region of diffusion-doped silicon by cobalt atoms. The thermally stimulated conductivity (TSC) of cobalt disilicide was investigated. The energy of the adhesion levels of 0.32 eV was determined for the structures of cobalt disilicide –...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2023-01-01
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| Series: | E3S Web of Conferences |
| Online Access: | https://www.e3s-conferences.org/articles/e3sconf/pdf/2023/39/e3sconf_transsiberia2023_14019.pdf |