Biaxial Piezoelectrically Driven MEMS Mirror with Large Design Flexibility

Biaxial Piezoelectrically Driven MEMS Mirror with Large Design Flexibility

In this work, a biaxial, piezoelectrically driven resonant MEMS mirror with large design flexibility is presented. After FEM-based design optimization to reduce material stress and thereby maximize the achievable total optical scanning angles, fabricated MEMS mirrors were electrically, mechanically,...

Disgrifiad llawn

Manylion Llyfryddiaeth
Prif Awduron: Lena Wysocki, Patrick Schütt, Jörg Albers, Gunnar Wille, Erdem Yarar, Paul Raschdorf, Lianzhi Wen, Shanshan Gu-Stoppel
Fformat: Erthygl
Iaith:English
Cyhoeddwyd: MDPI AG 2024-04-01
Cyfres:Proceedings
Pynciau:
resonant MEMS mirror
piezoelectric actuation
Lissajous scanning
Mynediad Ar-lein:https://www.mdpi.com/2504-3900/97/1/139

Rhyngrwyd

https://www.mdpi.com/2504-3900/97/1/139

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