Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure

Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure

This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as mode matching, improving the quality factor, etc. This paper focuses on the analy...

Täydet tiedot

Bibliografiset tiedot
Päätekijät: Chuanguo Xiong, Pengjun Zeng, Weishan Lv, Fengming Lu, Ming Zhang, Yuhua Huang, Fulong Zhu
Aineistotyyppi: Artikkeli
Kieli:English
Julkaistu: MDPI AG 2022-01-01
Sarja:Micromachines
Aiheet:
tuning fork gyroscope
mechanical sensitivity
mode shape
transmission efficiency
Taguchi method
Linkit:https://www.mdpi.com/2072-666X/13/2/172

Internet

https://www.mdpi.com/2072-666X/13/2/172

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