Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure

Design and Optimization of a Novel MEMS Tuning Fork Gyroscope Microstructure

This paper presents the design and optimization of a novel MEMS tuning fork gyroscope microstructure. In order to improve the mechanical sensitivity of the gyroscope, much research has been carried out in areas such as mode matching, improving the quality factor, etc. This paper focuses on the analy...

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Bibliographic Details
Main Authors: Chuanguo Xiong, Pengjun Zeng, Weishan Lv, Fengming Lu, Ming Zhang, Yuhua Huang, Fulong Zhu
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Micromachines
Subjects:
tuning fork gyroscope
mechanical sensitivity
mode shape
transmission efficiency
Taguchi method
Online Access:https://www.mdpi.com/2072-666X/13/2/172

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