Large-scale and high-quality III-nitride membranes through microcavity-assisted crack propagation by engineering tensile-stressed Ni layers

Large-scale and high-quality III-nitride membranes through microcavity-assisted crack propagation by engineering tensile-stressed Ni layers

Epitaxially grown III-nitride alloys are tightly bonded materials with mixed covalent-ionic bonds. This tight bonding presents tremendous challenges in developing III-nitride membranes, even though semiconductor membranes can provide numerous advantages by removing thick, inflexible, and costly subs...

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Bibliographic Details
Main Authors: Jung-Hong Min, Kwangjae Lee, Tae-Hoon Chung, Jung-Wook Min, Kuang-Hui Li, Chun Hong Kang, Hoe-Min Kwak, Tae-Hyeon Kim, Youyou Yuan, Kyoung-Kook Kim, Dong-Seon Lee, Tien Khee Ng, Boon S. Ooi
Format: Article
Language:English
Published: Editorial Office of Opto-Electronic Journals, Institute of Optics and Electronics, CAS, China 2022-10-01
Series:Opto-Electronic Science
Subjects:
iii-nitride alloys
membranes
nanoporous
ni stressor
light-emitting diodes
ultraviolet photodetectors
Online Access:https://www.oejournal.org/article/doi/10.29026/oes.2022.220016

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